A Review of Artificial Lateral Line in Sensor Fabrication and Bionic Applications for Robot Fish

Table 1

Summary of piezoresistive ALL sensors.

Author	Size	Sensitivity	Other parameters
Fan et al. [8]	In-plane cantilever: 1100 μm (l), 180 μm (w), 17 μm (t); Vertical cilium: 820 μm (h), 100 μm (w), 10 μm (t)	100 mm s^−1	Hair method: PDMA
Yang et al. [10, 32, 33]	Beam cilium: 2 μm (t), 40 μm (w), 100 μm (l); Cilium: 80 μm (d), 500 μm (h)	0.1 mm s^−1	Hair method: PDMA; Deflection: 55°
McConney et al. ‎[11]	Microfabricated hair: 550 μm (l), 100 μm (d); Total height: 825 μm	75 μm s^−1	Hair method: photopolymerization
Qualtieri et al. ‎[12]	Cantilever: 100 μm (w), 200 μm to 600 μm (l); Piezoresistor: 50 μm	Not available	Hair method: micromachining
Yaul et al. [15, 34]	10 mm (d), 1 mm (t)	Not available	Pressure resolution: 1.5 Pa
Fernandez et al. ‎[13]	Diaphragm size: ~1 mm; Spacing: ~1 mm; Thickness: ~1 mm	1 μV/Pa (10 V)	Pressure resolution: 1 Pa
Kottapalli et al. ‎[14]	330 μm (t), 2 mm (d)	14.3 μV/Pa (pressure); 90.5 mV/ms^−1 (velocity)	Flow resolution: 25 mm s^−1

l: length; w: width; t: thickness; d: diameter; h: height.